SPUTTERING TARGETS
SUPPLIED TO TECHNICAL SPECIFICATION

Tantalum Oxide (Ta₂O₅) Target

Tantalum Oxide (Ta₂O₅) Target supplied in standard and custom planar geometries for magnetron sputtering. Diameter, thickness, purity, target condition and optional OFHC copper backing plate are reviewed against the cathode and process requirements.

2" dia × 0.125"2" dia × 0.250"3" dia × 0.125"3" dia × 0.250"4" dia × 0.125"4" dia × 0.250"
Tantalum Oxide (Ta₂O₅) Target — representative product visual
Ta₂O₅Representative visual
RFQ CONFIGURATION

Choose target size, purity and backing-plate requirement.

Complete the technical selections before adding the item. Unknown fields may remain blank; availability, lead time and commercial terms are confirmed in the quotation.

SPECIFICATION HELP

What do these options mean?

If you are unsure, choose the custom option in the RFQ. The technical team will clarify the required specification for the application.

Purity

The stated minimum fraction of the principal element or compound.

Backing plate

The support plate—typically OFHC copper—used for mounting and heat transfer.

Bonding

The thermal and mechanical joining process between target and backing plate.

Scope

Supply to technical specification; suitability and lead time are confirmed in the quotation.

Documents

State any required analysis certificate, drawing or test report. Available documents are confirmed for the product and delivery scope in the quotation.

TYPICAL SPECIFICATION ENVELOPE

Configure the requirement, not just the product name.

MaterialTantalum oxide (Ta₂O₅)
Purity99.9%–99.999% subject to material
Diameter2", 3", 4", 6" and custom
Thickness0.125", 0.250" and custom
OptionsMonolithic or bonded to OFHC copper backing plate
DocumentationAnalysis certificate
APPLICATIONS

Built around the process.

01Optical coatings
02Dielectric films
03Sensors
NEED A NON-STANDARD SPEC?

Send the drawing, target value or process condition.

Our technical team will evaluate the feasible supply configuration before quotation.

Complete product configuration ↑